By Marc J. Madou
Designed for technology and engineering scholars, this article specializes in rising tendencies in strategies for fabricating MEMS and NEMS units. The publication experiences diverse types of lithography, subtractive fabric elimination strategies, and additive applied sciences. either top-down and bottom-up fabrication procedures are exhaustively lined and the advantages of the several ways are in comparison. scholars can use this colour quantity as a consultant to aid determine the right fabrication strategy for any form of micro- or nano-machine.
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Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J. Madou